SU-8/Definition: Difference between revisions
< SU-8
Jump to navigation
Jump to search
imported>Meg Taylor (add) |
(No difference)
|
Latest revision as of 08:30, 11 September 2009
Commonly used viscous epoxy-based negative photoresist polymer, which can be spun or spread over a thickness ranging from 1 micrometer up to 2 millimeters and still be processed with standard contact lithography.